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13.

C, H, N and O in Si and Characterization and Simulation of Materials and Processes Proceedings of Symposium N and Symposium G of the 1995 E-Mrs Spring Conference, Held in Strasbourg, France, 22-26 May 1995

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Symposium N on Carbon, Hydrogen, Nitrogen, and Oxygen in Silicon and Other Elemental Semiconductors (1995 : Strasbourg, France) Borghesi, A. Symposium G on Atomic Scale Characterization and Simulation of Materials and Processes (1995 : Strasbourg, France)

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ScienceDirect http://www.sciencedirect.com/science/book/9780444824134

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14.

Semiconductor silicon crystal technology

Yazar

Shimura, Fumio.