chapter 2 Potential Actuation Mechanisms, Their Performance Capabilities, and Applications -- chapter 3 Latest and Unique Methods for Actuation -- chapter 4 Packaging, Processing, and Material Requirements for MEMS Devices -- chapter 5 RF-MEMS Switches Operating at Microwave and mm-Wave Frequencies -- chapter 6 RF/Microwave MEMS Phase Shifter -- chapter 7 Applications of Micropumps and Microfluidics -- chapter 8 Miscellaneous MEMS/Nanotechnology Devices and Sensors for Commercial and Military Applications -- chapter 9 Materials for MEMS and Nanotechnology-Based Sensors and Devices.