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1. 
Cover image for Scanning probe lithography : fundamentals, materials, and applications
Scanning probe lithography : fundamentals, materials, and applications
Author 
Ryu, Yu Kyoung, author. Martínez Rodrigo, Javier, author.
Preferred Shelf Number 
TK7888.4
Electronic Access 
Taylor & Francis https://www.taylorfrancis.com/books/9781003223610
OCLC metadata license agreement http://www.oclc.org/content/dam/oclc/forms/terms/vbrl-201703.pdf
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2. 
Cover image for Microlithography : science and technology
Microlithography : science and technology
Author 
Smith, Bruce W., 1959- editor. Suzuki, Kazuaki, editor.
Preferred Shelf Number 
TK7836
Electronic Access 
Taylor & Francis https://www.taylorfrancis.com/books/9781315117171
OCLC metadata license agreement http://www.oclc.org/content/dam/oclc/forms/terms/vbrl-201703.pdf
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3. 
Cover image for Fundamental principles of optical lithography the science of microfabrication
Fundamental principles of optical lithography the science of microfabrication
Author 
Mack, Chris A. Wiley InterScience (Online service)
Preferred Shelf Number 
ONLINE
Electronic Access 
John Wiley http://dx.doi.org/10.1002/9780470723876
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4. 
Cover image for Microlithography : science and technology
Microlithography : science and technology
Author 
Suzuki, Kazuaki. Smith, Bruce W., 1959-
Preferred Shelf Number 
TK7836 .M525 2007
Electronic Access 
Click here to view.
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