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2007
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Cover image for Fundamental principles of optical lithography the science of microfabrication
Fundamental principles of optical lithography the science of microfabrication
Author 
Mack, Chris A. Wiley InterScience (Online service)
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ONLINE
Electronic Access 
John Wiley http://dx.doi.org/10.1002/9780470723876
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2. 
Cover image for Microlithography science and technology
Microlithography science and technology
Author 
Suzuki, Kazuaki. Smith, Bruce W., 1959-
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ONLINE
Electronic Access 
Distributed by publisher. Purchase or institutional license may be required for access.
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Online Library~1
Available:
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