Cover image for Run-to-run control in semiconductor manufacturing
Title:
Run-to-run control in semiconductor manufacturing
Author:
Moyne, James.
ISBN:
9781420040661
Publication Information:
Boca Raton : CRC Press, 2001.
Physical Description:
348 p. : ill.
Subject Term:
Semiconductors -- Design and construction.

Semiconductor industry -- Production control.

Electronic packaging.

Production management.
Added Author:
Moyne, James.

Del Castillo, Enrique.

Hurwitz, Arnon Max.
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