chapter Introduction -- chapter 1 Advanced Process Control in the Semiconductor Industry -- chapter 2 Process Control and Optimization Methods for Run-to-Run Application -- chapter 3 Basic R2R Control Algorithms -- chapter 4 Learning and Optimization Algorithms for an Optimizing Adaptive Quality Controller -- chapter 5 An Adaptive Run-to-Run Optimizing Controller for Linear and Nonlinear Processes -- chapter 6 A Comparative Analysis of Run-to-Run Control Algorithms in the Semiconductor Manufacturing Industry -- chapter 7 Existing and Envisioned Control Environment for Semiconductor Manufacturing -- chapter 8 Design Requirements for an Integrative R2R Control Solution -- chapter 9 The Generic Cell Controller (GCC) -- chapter 10 Derivation of a Piggyback Run-to-Run Control Solution Design -- chapter 11 Integrated Run-to-Run Control Solution Examples -- chapter 12 Design and Optimization of an Optimizing Adaptive Quality Controller, Generic Cell Controller Enabled Solution -- chapter 13 Case Study: Furnace Capability Improvement Using a Customized Run-to-Run Control Solution / chapter 14 Process Recipe Optimization / chapter 15 Multizone Uniformity Control of a CMP Process Utilizing a Pre- and Postmeasurement Strategy / chapter 16 Control of Photolithography Alignment / chapter 17 Age-Based Double EWMA Controller and Its Application to a CMP Process / chapter 18 Advancements in Chemical Mechanical Planarization Process Automation and Control / chapter 19 An Enhanced Exponentially Weighted Moving Average Controller for Processes Subject to Random Disturbances / chapter 20 Enabling Generic Interprocess Multistep Control: the Active Controller