Title:
Microlithography : science and technology
Author:
Suzuki, Kazuaki.
ISBN:
9781420051537
9781315219554
9781351826754
Edition:
Second edition.
Physical Description:
1 online resource (848 pages)
Series:
Optical science and engineering ; 126
Optical science and engineering (Boca Raton, Fla.) ; 126.
Contents:
part Part I: Exposure System -- chapter 1 System Overview of Optical Steppers and Scanners -- chapter 2 Optical Lithography Modeling -- chapter 3 Optics for Photolithography -- chapter 4 Excimer Laser for Advanced Microlithography -- chapter 5 Alignment and Overlay -- chapter 6 Electron Beam Lithography Systems -- chapter 7 X-ray Lithography -- chapter 8 EUV Lithography -- chapter 9 Imprint Lithography -- part Part II: Resists and Processing -- chapter 10 Chemistry of Photoresist Materials -- chapter 11 Resist Processing -- chapter 12 Multilayer Resist Technology -- chapter 13 Dry Etching of Photoresists -- part Part III: Metrology and Nanolithography -- chapter 14 Critical-Dimensional Metrology for Integrated-Circuit Technology -- chapter 15 Electron Beam Nanolithography.
Electronic Access:
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Library | Material Type | Item Barcode | Shelf Number | Status | Item Holds |
|---|---|---|---|---|---|
Searching... | E-Book | 542483-1001 | TK7836 .M525 2007 | Searching... | Searching... |