Cover image for Microlithography : science and technology
Title:
Microlithography : science and technology
Author:
Smith, Bruce W., 1959- editor.
ISBN:
9781315117171

9781439876763

9781351633949

9781351643443
Edition:
Third edition.
Physical Description:
1 online resource.
Subject Term:
Microlithography -- Industrial applications.

Integrated circuits -- Masks.

Metal oxide semiconductors, Complementary -- Design and construction.

Manufacturing processes.

TECHNOLOGY / Lasers

TECHNOLOGY / Electronics / Microelectronics
Added Author:
Smith, Bruce W., 1959-

Suzuki, Kazuaki,
Electronic Access:
Taylor & Francis https://www.taylorfrancis.com/books/9781315117171
OCLC metadata license agreement http://www.oclc.org/content/dam/oclc/forms/terms/vbrl-201703.pdf
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